Teltec Pacific is a technical Sales and Service organisation serving the Semiconductor, Photonics and Optoelectronics Industries in Asia Pacific countries.

OAI - Mask Aligners & Exposure Systems

OAI is a leading manufacturer of reliable, precision equipment for MEMS, semiconductors, nanotechnology, cleanroom automation, and for UV light measurement. With products installed worldwide, OAI systems are used for both R&D and production of semiconductors, MEMS and microfluidic devices. From mask aligners and UV light sources to UV power meters, OAI is a leader in the industry for over 40 years.

MEMS &Microfluidics Products : 

Mask Aligners       


  OAI Series 6000 Productions Mask Aligners 

For: Semiconductors, MEMS, Sensors, Microfluidics, IOT, Packaging


High Yields with Lowest Cost Ownership

 Throughput ≧200WPH in 1st Mask mode
 ≦0.5μm Frontside & ≦1.1μm Backside Auto-Alignment Accuracy
 ADVANCED BEAM OPTICS: ±3% Uniformity - Submicron printing
  Down to 0.45μm Printing Resolution
 WIDE VARIETY of WAFER HANDLING including thick & bonded or warped substrates
  Temperature Controlled & ESD CHUCKS
  Cluster Tool Integration